Products
Technology for Semiconductor & Disply Equipment Solution
Technology for Semiconductor & Disply Equipment Solution
M-TRACK
● Features
■ 150mm(6") / 200mm(8") Manaul TRACK
: 15" Touch LCD Monitor
: Substrate Size - 150mm, 200mm
: Hot Plate / Cool Plate
● Specification
Description | Contents | Remark | |||||||||
Model | M-TRACK8 |
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Wafer Size | 150mm(6") / 200mm(8") Multi Wafer Chuck |
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Spin Coater Module | PR Nozzle 1EA / EBR Nozzle 1EA / BSR Nozzle 1EA |
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Display | 15" Touch Monitor |
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Spin Motor (Max RPM) | 5000 RPM |
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Controller Type | PC Base System (Windows) |
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Hot Plate Temperature | 50 ~ 180℃ | ||||||||||
Utility | CDA, PN2, Vacuum, Exhaust |
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Power | 3PH 220VAC 10A |
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Dimension(W*D*H) | 1200*940*1745(mm) |
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Warranty | 1 year |
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