Products
Technology for Semiconductor & Disply Equipment Solution
Technology for Semiconductor & Disply Equipment Solution
150mm SRD (Dual Stack)
■ Specifications
Description | Contents | Remarks |
Model | SD-1505D2 (Dual Stack) |
|
Wafer / Glass Size | 150mm(6") Wafer / 156*156mm Glass |
|
N2 Filter Size | Hastelloy / 2 nm |
|
Display | 7" TFT Touch LCD |
|
D.I Water Shower Methode | Single mode Multi Spray |
|
Number of N2 Heater Cartridge | TOP 1EA / BOTTOM 1EA |
|
Hot N2 Temperature | 1CH, 50 ~ 400℃ SSR Control |
|
Acceleration Speed | 400 RPM / sec |
|
Recipe Storage | 10 |
|
Power | 1PH, 220VAC, 30A |
|
Dimension(W*D*H) | 560 x 860 x 2000mm |
|
Certificated | CE |
|