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System

    150mm SRD (Single Stack)

  • Model : SD-1505S
    Wafer Size : 150mm(6")
    Glass Size : 150* 150mm

Description




○ Features

     150mm(6") Spin Rinse Dryer (CE Certification)

       : Single Stack

       : Front Cassette Loading

       : Single Cassette Capacity up to 150mm

       : 5.7" TFT Touch LCD Monitor

       : Substrate Size - 150mm

       : Max Motor Speed - 3000 rpm

       : Acceleration Speed - 400 rpm/sec

       : RPM Limit - 2800 rpm

       : Number of N2 Heater Cartridge - 1

 

○ Specification

 Description

Contents

Remark 

 Model

 SD-1505S (Single Stack)

 

 Wafer / Glass Size

 150mm(6") Wafer / 150*150mm Glass

 

 Stainless Steel N2 Fiter

 0.003~0.005um

 

 Display

 HMI (Parameter Monitoring System)

 

 Hot N2 Temperature

 Over Hi 100

 

 Spin Tolerance

 3%

 

 Setting Time

 0-9999 sec

 

 Power

 1 Phase 220VAC, 13A

 

 Dimension(W*D*H)

 480*740*1500(mm)

 

 Warranty

 1 year

 

 

SEMITRONIX | System | Spin Rinse Dryer(SRD) | 150mm SRD (Single Stack)