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System

    200mm SRD (High Profile Carrier)

  • Model : SD-2105S2
    Wafer Size : 200mm(8")
    Glass Size : 200*200mm
    Single Stack

Description





○ Features

     200mm(8") Spin Rinse Dryer (CE Certificated)

       : Single Stack

       : Front Cassette Loading

       : Single Cassette Capacity up to 200mm

       : 7" TFT Touch LCD Monitor

       : Substrate Size - 200mm

       : Max Motor Speed - 3000 rpm

       : Acceleration Speed - 400 rpm/sec

       : RPM Limit - 2200 rpm

       : N2 Heater Cartridge : Single or Dual Mode 

 

○ Specification

 Description

Contents

Remark 

 Model

 SD-2105S2 (High Profile Carrier)

 

 Wafer / Glass Size

 200mm(8") Wafer / 200*200mm Glass(High Profile Carrier)

 

 N2 Filter Size

 Hastelloy / 0.003 um

 

 Display

 7" TFT Touch LCD

 

 Hot N2 Temperature

 2CH / 20 ~ 400℃ SSR Control 

 

 Spin Tolerance

 3%

 

 Setting Time

 0-9999 sec

 

 Power

 1 Phase 220VAC, 20A

 

 Dimension(W*D*H)

 540*740*1600(mm)

 

 Warranty

 1 year

 

 

 

SEMITRONIX | System | Spin Rinse Dryer(SRD) | 200mm SRD (High Profile Carrier)