Products
Technology for Semiconductor & Disply Equipment Solution
Technology for Semiconductor & Disply Equipment Solution
200mm SRD (High Profile Carrier)
■ Specifications
Description | Contents | Remarks |
Model | SD-2105S2 (Single Stack) |
|
Wafer / Glass Size | - Wafer : up to 200mm Wafer - Glass : up to 200x200mm |
|
N2 Filter Size | Hastelloy / 2 nm |
|
Display | 7" TFT Touch LCD |
|
D.I Water Shower Methode | Dual mode Multi Spray |
|
Number of N2 Heater Cartridge | 2 |
|
Hot N2 Temperature | 2CH, 50 ~ 400℃ SSR Control |
|
Acceleration Speed | 400 RPM / sec |
|
Recipe Storage | 10 |
|
Power | 1PH, 220VAC, 20A |
|
Dimension(W*D*H) | 540 x 740 x 1600mm |
|
Certificated | CE |
|