Products

Technology for Semiconductor & Disply Equipment Solution

  • Home >
  • Products >
  • System

System

    200mm SRD (Low Profile Carrier)

  • Model : SD-2005S2
    Wafer Size : 200mm(8")
    Glass Size : 178*178mm
    Carrier : 200mm Low Profile Carrier

Description







  

 Specifications


 Description

Contents

Remarks 

   Model

    SD-2005S2 (Single Stack)

 

   Wafer / Glass Size

    - Wafer : up to 200mm Wafer (Low Profile Carrier only) 

    - Glass : up to 178x178mm

 

   N2 Filter Size

    Hastelloy / 2 nm

 

   Display

    7" TFT Touch LCD 

 

   D.I Water Shower Methode  

    Single mode Multi Spray

 

   Number of N2 Heater Cartridge 

    1 

 

   Hot N2 Temperature

    1CH, 50 ~ 400℃ SSR Control 

 

   Acceleration Speed 

    400 RPM / sec

 

   Recipe Storage 

    10 

 

   Power

    1PH, 220VAC, 15A

 

   Dimension(W*D*H)

    480 x 740 x 1500mm

 

   Certificated

    CE

 

 

 

 

SEMITRONIX | System | Spin Rinse Dryer(SRD) | 200mm SRD (Low Profile Carrier)