Products
Technology for Semiconductor & Disply Equipment Solution
Technology for Semiconductor & Disply Equipment Solution
200mm SRD (Low Profile Carrier)
■ Specifications
Description | Contents | Remarks |
Model | SD-2005S2 (Single Stack) |
|
Wafer / Glass Size | - Wafer : up to 200mm Wafer (Low Profile Carrier only) - Glass : up to 178x178mm |
|
N2 Filter Size | Hastelloy / 2 nm |
|
Display | 7" TFT Touch LCD |
|
D.I Water Shower Methode | Single mode Multi Spray |
|
Number of N2 Heater Cartridge | 1 |
|
Hot N2 Temperature | 1CH, 50 ~ 400℃ SSR Control |
|
Acceleration Speed | 400 RPM / sec |
|
Recipe Storage | 10 |
|
Power | 1PH, 220VAC, 15A |
|
Dimension(W*D*H) | 480 x 740 x 1500mm |
|
Certificated | CE |
|