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System

    300mm SRD

  • Model : SD-3005S
    Wafer Size : 300mm(12")
    Glass Size : 300*300mm

Description




● Features

     300mm(12") Spin Rinse Dryer (CE Certificated)

       : Single Stack

       : Front Cassette Loading

       : Single Cassette Capacity up to 300mm

       : 5.7" TFT Touch LCD Monitor

       : Substrate Size - 300mm

       : Max Motor Speed - 3000 rpm

       : Acceleration Speed - 300 rpm/sec

       : RPM Limit - 1500 rpm

       : Number of N2 Heater Cartridge - 2

 

 Specification

 Description

Contents

Remark 

 Model

 SD-3005S (Single Stack)

 

 Wafer / Glass Size

 300mm(12") Wafer / 300*300mm Glass

 

 N2 Filter Size

 Hastelloy / 0.003 um

 

 Display

 5.7" TFT TOUCH LCD 

 

 Hot N2 Temperature

 Dual / 20 ~ 400℃ SSR Control 

 

 Spin Tolerance

 3%

 

 Setting Time

 0-9999sec

 

 Power

 3 Phase 220VAC, 30A

 

 Dimension(W*D*H)

 750*835*1550(mm)

 

 Warranty

 1 year

  

SEMITRONIX | System | Spin Rinse Dryer(SRD) | 300mm SRD