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System

    300mm SRD

  • Model : SD-3005S2
    Wafer Size : 300mm(12")
    Glass Size : 300*300mm

Description







  

 Specifications


 Description

Contents

Remarks 

   Model

    SD-3005S2 (Single Stack)

 

   Wafer / Glass Size

    - Wafer : up to 300mm Wafer  

    - Glass  : up to 300x300mm

 

   N2 Filter Size

    Hastelloy / 2 nm

 

   Display

    7" TFT Touch LCD 

 

   D.I Water Shower Methode  

    Dual mode Multi Spray

 

   Number of N2 Heater Cartridge 

    2 

 

   Hot N2 Temperature

    2CH, 50 ~ 400℃ SSR Control 

 

   Acceleration Speed 

    400 RPM / sec

 

   Recipe Storage 

    10 

 

   Power

    3PH, 220VAC, 30A

 

   Dimension(W*D*H)

    750 x 835 x 1600mm

 

   Certificated

    CE

 

 

 

SEMITRONIX | System | Spin Rinse Dryer(SRD) | 300mm SRD