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System

    M-TRACK

  • Manual Track

Description

● Features

     150mm(6") / 200mm(8") Manaul TRACK

       : 15" Touch LCD Monitor

       : Substrate Size - 150mm, 200mm

       : Hot Plate / Cool Plate

 

 Specification

 Description

Contents

Remark 

 Model

 M-TRACK8

 

 Wafer Size

 150mm(6") / 200mm(8") Multi Wafer Chuck

 

 Spin Coater Module

 PR Nozzle 1EA / EBR Nozzle 1EA / BSR Nozzle 1EA

 

 Display

 15" Touch Monitor

 

 Spin Motor (Max RPM)

 5000 RPM

 

 Controller Type

 PC Base System (Windows)

 

 Hot Plate Temperature 50 ~ 180 

 Utility

 CDA, PN2, Vacuum, Exhaust

 

 Power

 3PH 220VAC 10A

 

 Dimension(W*D*H)

 1200*940*1745(mm)

 

 Warranty

 1 year

  

SEMITRONIX | System | 19 | M-TRACK