- The STOS™, SEMITRONIX TECHNOLOGY's system software for
- Si, SiC and GaN semiconductor equipment software.
- Easy to develop application in a short time
- Easy to build a control system for hardware.
- Easy to operate the equipment
- Parameter trend function (Data Analysis)/ All of the Batch and alarm history.
- Auto Leakage check, Auto Temperature profile function.
Specifications
Applications |
Furnace Equipment for Semiconductor, Solar and MEMS |
Operating System |
Windows 10 / 11 (x64) |
Development Tool |
Visual C++ |
Communication Support |
MECHATROLINK, EtherCAT, Modbus, Ethernet, RS232C, HSMS, SECS |
Operation Panel |
TFT Touch LCD Monitor (15″) |
Resolution |
1024 * 768 |
Available Furnaces
| Type | Maker | Application Model |
|---|---|---|
| H/FHorizontal Furnace | BTU (Bruce) | 7531C, BDF-4, BDF-41, BDF Series |
| CENTROTHERM | E1200, E1550, E2000 | |
| TEMPRESS | Omega, TS6, TS8 Series | |
| THERMCO | 4000, 5000, 9000, TMX Series | |
| KOKUSAI | DD-6400 | |
| SELTRON (SEL) | SHF-125, SHF-150, SJF-1000, SJF-2000 | |
| TEL | UL2604 | |
| V/FVertical Furnace | KOKUSAI | DD-802, DJ-802, DD-803, DJ-803 |
| TEL | Pending |