ModelSD-1505D2
Wafer Size150mm(6")
Glass Size156x156mm (Solar M4 Compatible)
- Dual Stack
SpecificationsSD-1505D2
Model |
SD-1505D2 (Dual Stack) |
Wafer / Glass Size |
150mm(6″) Wafer / 156*156mm Glass |
N2 Filter Size |
Hastelloy / 2 nm |
Display |
7″ TFT Touch LCD |
D.I Water Shower Method |
Single mode Multi Spray |
Number of N2 Heater Cartridge |
TOP 1EA / BOTTOM 1EA |
Hot N2 Temperature |
1CH, 50 ~ 400℃ SSR Control |
Acceleration Speed |
400 RPM / sec |
Recipe Storage |
10 |
Power |
1PH, 220VAC, 30A |
Dimension(W*D*H) |
560 x 860 x 2000mm |
Certification |