Equipment & Solutions

Products

System

Diffusion Furnace & LP-CVD

3
300mm Vertical Furnace
300mm Vertical FurnaceView details →
200mm Vertical Furnace
200mm Vertical FurnaceView details →
150 mm / 200 mm Horizontal Furnace
150 mm / 200 mm Horizontal FurnaceView details →
System

R&D Furnace

2
R&D Furnace (Auto loader)
R&D Furnace (Auto loader)View details →
R&D Furnace
R&D FurnaceView details →
System

Spin Rinse Dryer & TRACK

6
300mm SRD
300mm SRDView details →
200mm SRD (High Profile Carrier)
200mm SRD (High Profile Carrier)View details →
200mm SRD (Low Profile Carrier)
200mm SRD (Low Profile Carrier)View details →
150mm SRD (Single Stack)
150mm SRD (Single Stack)View details →
150mm SRD (Dual Stack)
150mm SRD (Dual Stack)View details →
M-TRACK
M-TRACKView details →
System · Refurbishment

Furnace Software Upgrade

3
TEMPRESS(CANARY) FURNACE Software Upgrade
TEMPRESS(CANARY) FURNACE Software UpgradeView details →
BTU / BTI FURNACE Software Upgrade
BTU / BTI FURNACE Software UpgradeView details →
TEMPRESS FURNACE Software Upgrade
TEMPRESS FURNACE Software UpgradeView details →
System · Refurbishment

Controllers

2
LIQUID LEAKAGE SENSOR (CONTROLLER)
LIQUID LEAKAGE SENSOR (CONTROLLER)View details →
LIQUID LEAKAGE SENSOR (SENSOR MODULE)
LIQUID LEAKAGE SENSOR (SENSOR MODULE)View details →
Software

Software

2
STOS 2026
STOS 2026View details →
FTOS 2026
FTOS 2026View details →
Software

Solution

1
Temperature Control Solution
Temperature Control SolutionView details →
Wafer & SIC

Wafer

4
200mm Wafer (NOTCH)
200mm Wafer (NOTCH)View details →
150mm Wafer (SEMI)
150mm Wafer (SEMI)View details →
150mm Wafer (JEIDA)
150mm Wafer (JEIDA)View details →
100mm Wafer
100mm WaferView details →
Wafer & SIC

SIC Paddle

4
SIC PADDLE (2224mm)
SIC PADDLE (2224mm)View details →
SIC PADDLE (1480mm)
SIC PADDLE (1480mm)View details →
SIC PADDLE(1850mm)
SIC PADDLE(1850mm)View details →
No Image
SIC PADDLE (1650mm)View details →
Wafer & SIC

SIC TUBE

1
No Image
SIC TUBEView details →
Wafer & SIC

SIC BOAT

3
SIC BOAT (200mm)
SIC BOAT (200mm)View details →
SIC BOAT (150mm)
SIC BOAT (150mm)View details →
No Image
SIC BOAT (125mm)View details →
Mini8-based PC temperature control system diagram

Temperature Control Solution

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A furnace temperature control retrofit built around the Eurotherm Mini8 multi-loop controller and STOS PC software. The legacy temperature controller

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