Equipment & Solutions · System

Products

System

Diffusion Furnace & LP-CVD

3
300mm Vertical Furnace
300mm Vertical FurnaceView details →
200mm Vertical Furnace
200mm Vertical FurnaceView details →
150 mm / 200 mm Horizontal Furnace
150 mm / 200 mm Horizontal FurnaceView details →
System

R&D Furnace

2
R&D Furnace (Auto loader)
R&D Furnace (Auto loader)View details →
R&D Furnace
R&D FurnaceView details →
System

Spin Rinse Dryer & TRACK

6
300mm SRD
300mm SRDView details →
200mm SRD (High Profile Carrier)
200mm SRD (High Profile Carrier)View details →
200mm SRD (Low Profile Carrier)
200mm SRD (Low Profile Carrier)View details →
150mm SRD (Single Stack)
150mm SRD (Single Stack)View details →
150mm SRD (Dual Stack)
150mm SRD (Dual Stack)View details →
M-TRACK
M-TRACKView details →
System

Software

2
STOS 2026
STOS 2026View details →
FTOS 2026
FTOS 2026View details →
System

Solution

1
Temperature Control Solution
Temperature Control SolutionView details →
Mini8-based PC temperature control system diagram

Temperature Control Solution

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A furnace temperature control retrofit built around the Eurotherm Mini8 multi-loop controller and STOS PC software. The legacy temperature controller

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