ModelSD-1505S3
Wafer Size150mm(6")
Glass Size156x156mm (Solar M4 Compatible)
SpecificationsSD-1505S3
| Model | SD-1505S3 (Single Stack) |
| Wafer / Glass Size | 150mm(6″) Wafer / 156*156mm Glass |
| N2 Filter Size | Hastelloy / 2 nm |
| Display | 7″ TFT Touch LCD |
| D.I Water Shower Method | Single mode Multi Spray |
| Number of N2 Heater Cartridge | 1 |
| Hot N2 Temperature | 1CH, 50 ~ 400℃ SSR Control |
| Acceleration Speed | 400 RPM / sec |
| Recipe Storage | 10 |
| Power | 1PH, 220VAC, 15A |
| Dimension(W*D*H) | 480 x 740 x 1500mm |
| Certification | CE인증서 보기↗ |