Equipment & Solutions

Products

System

Diffusion Furnace & LP-CVD

3
300mm Vertical Furnace
300mm Vertical Furnace자세히 보기 →
200mm Vertical Furnace
200mm Vertical Furnace자세히 보기 →
150 mm / 200 mm Horizontal Furnace
150 mm / 200 mm Horizontal Furnace자세히 보기 →
System

R&D Furnace

2
R&D Furnace (Auto loader)
R&D Furnace (Auto loader)자세히 보기 →
R&D Furnace
R&D Furnace자세히 보기 →
System

Spin Rinse Dryer & TRACK

6
300mm SRD
300mm SRD자세히 보기 →
200mm SRD (High Profile Carrier)
200mm SRD (High Profile Carrier)자세히 보기 →
200mm SRD (Low Profile Carrier)
200mm SRD (Low Profile Carrier)자세히 보기 →
150mm SRD (Single Stack)
150mm SRD (Single Stack)자세히 보기 →
150mm SRD (Dual Stack)
150mm SRD (Dual Stack)자세히 보기 →
M-TRACK
M-TRACK자세히 보기 →
System · Refurbishment

Furnace Software Upgrade

3
TEMPRESS(CANARY) FURNACE Software Upgrade
TEMPRESS(CANARY) FURNACE Software Upgrade자세히 보기 →
BTU / BTI FURNACE Software Upgrade
BTU / BTI FURNACE Software Upgrade자세히 보기 →
TEMPRESS FURNACE Software Upgrade
TEMPRESS FURNACE Software Upgrade자세히 보기 →
System · Refurbishment

Controllers

2
LIQUID LEAKAGE SENSOR (CONTROLLER)
LIQUID LEAKAGE SENSOR (CONTROLLER)자세히 보기 →
LIQUID LEAKAGE SENSOR (SENSOR MODULE)
LIQUID LEAKAGE SENSOR (SENSOR MODULE)자세히 보기 →
Software

Software

2
STOS 2026
STOS 2026자세히 보기 →
FTOS 2026
FTOS 2026자세히 보기 →
Software

Solution

1
Temperature Control Solution
Temperature Control Solution자세히 보기 →
Wafer & SIC

Wafer

4
200mm Wafer (NOTCH)
200mm Wafer (NOTCH)자세히 보기 →
150mm Wafer (SEMI)
150mm Wafer (SEMI)자세히 보기 →
150mm Wafer (JEIDA)
150mm Wafer (JEIDA)자세히 보기 →
100mm Wafer
100mm Wafer자세히 보기 →
Wafer & SIC

SIC Paddle

4
SIC PADDLE (2224mm)
SIC PADDLE (2224mm)자세히 보기 →
SIC PADDLE (1480mm)
SIC PADDLE (1480mm)자세히 보기 →
SIC PADDLE(1850mm)
SIC PADDLE(1850mm)자세히 보기 →
No Image
SIC PADDLE (1650mm)자세히 보기 →
Wafer & SIC

SIC TUBE

1
No Image
SIC TUBE자세히 보기 →
Wafer & SIC

SIC BOAT

3
SIC BOAT (200mm)
SIC BOAT (200mm)자세히 보기 →
SIC BOAT (150mm)
SIC BOAT (150mm)자세히 보기 →
No Image
SIC BOAT (125mm)자세히 보기 →
Mini8-based PC temperature control system diagram

Temperature Control Solution

/

퍼니스의 온도제어를 Eurotherm Mini8 멀티루프 컨트롤러와 STOS PC 소프트웨어로 새로 구성하는 솔루션입니다. 구형 온도제어기를 조작판 없는 Mini8로 교체하고, 존별 설정·프로파일·알람·기록을

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