SEMITRONIX TECHNOLOGY CO., LTD. (㈜세미트로닉스테크놀러지) is a Korean manufacturer of semiconductor and MEMS thermal-process equipment, based in Cheongju, Chungcheongbuk-do, with a technical center in Daegu. We build horizontal and vertical diffusion furnaces and LP-CVD systems, R&D furnaces, spin rinse dryers and the M-TRACK manual coater track, develop the STOS furnace control software, upgrade the controllers and software of Tempress, BTU, Kokusai and TEL furnaces, provide Eurotherm Mini8 temperature control solutions, and supply spare parts and used equipment.
- Products
- Spare parts
- Used equipment inventory
- Company profile
- Contact — +82-43-231-4211, pur@semitronix.co.kr
Thermal Process Solutions
for Semiconductor & MEMS
SEMITRONIX designs and manufactures diffusion furnaces, LP-CVD systems and spin rinse dryers for semiconductor, MEMS and display fabs — from new equipment to controller replacement and software upgrades.
Since 2011 · Cheongju, Korea · 30+ products
Diffusion Furnace
& LP-CVD
Horizontal, vertical and R&D furnaces, custom-built to order for 100 to 300 mm wafers and your process requirements.
Spin Rinse Dryers
150 to 300 mm spin rinse dryers in single or dual stack, with rotors and carriers built in-house and spare parts from stock.
Furnace Control
Software – STOS
STOS puts recipe, temperature, gas and robot control on one screen — replacing legacy controllers on Tempress, BTU, Kokusai and TEL furnaces, with Windows-based trend, alarm and access management.
M-TRACK
Manual Coater Track
A compact manual track for photoresist coating: spin coater with dispense arm, hot plate and cool plate, all run from one touch screen — built for R&D lines and small-lot production.
R&D Furnace
A compact single-tube furnace for research labs and pilot lines: cantilever loading, atmospheric or LP-CVD processes and the same STOS control as our production systems.
Furnace Software
Upgrade
Keep your Tempress, BTU, Kokusai or TEL furnace and replace only the controller and software with STOS — the tube, heater and gas system stay exactly as they are.
Temperature Control
Solution
Replace or retune your furnace temperature control: Eurotherm Mini8 multi-loop controllers with STOS PC control, autotuned zone by zone for tighter uniformity — on our furnaces or any other make.
Thermal process equipment,
built and serviced in Korea.
Furnace, Spin Rinse Dryer and Software — three zones of thermal processing for semiconductor and MEMS fabs.
Still running a legacy furnace?
Bring it up to date with STOS.
We replace aging controllers on Tempress, BTU, Kokusai and TEL furnaces with our STOS software and new control hardware — keeping the tube, heater and gas system you already trust.
Four reasons fabs and labs
keep coming back.
Engineering the heat
behind every wafer.
Based in Cheongju, Korea, SEMITRONIX TECHNOLOGY designs and builds thermal process equipment and writes the software that runs it. One team covers new systems, upgrades, spare parts and on-site support.