Equipment & Solutions · System

Products

System

Diffusion Furnace & LP-CVD

3
300mm Vertical Furnace
300mm Vertical Furnace자세히 보기 →
200mm Vertical Furnace
200mm Vertical Furnace자세히 보기 →
150 mm / 200 mm Horizontal Furnace
150 mm / 200 mm Horizontal Furnace자세히 보기 →
System

R&D Furnace

2
R&D Furnace (Auto loader)
R&D Furnace (Auto loader)자세히 보기 →
R&D Furnace
R&D Furnace자세히 보기 →
System

Spin Rinse Dryer & TRACK

6
300mm SRD
300mm SRD자세히 보기 →
200mm SRD (High Profile Carrier)
200mm SRD (High Profile Carrier)자세히 보기 →
200mm SRD (Low Profile Carrier)
200mm SRD (Low Profile Carrier)자세히 보기 →
150mm SRD (Single Stack)
150mm SRD (Single Stack)자세히 보기 →
150mm SRD (Dual Stack)
150mm SRD (Dual Stack)자세히 보기 →
M-TRACK
M-TRACK자세히 보기 →
System · Refurbishment

Furnace Software Upgrade

3
TEMPRESS(CANARY) FURNACE Software Upgrade
TEMPRESS(CANARY) FURNACE Software Upgrade자세히 보기 →
BTU / BTI FURNACE Software Upgrade
BTU / BTI FURNACE Software Upgrade자세히 보기 →
TEMPRESS FURNACE Software Upgrade
TEMPRESS FURNACE Software Upgrade자세히 보기 →
System · Refurbishment

Controllers

2
LIQUID LEAKAGE SENSOR (CONTROLLER)
LIQUID LEAKAGE SENSOR (CONTROLLER)자세히 보기 →
LIQUID LEAKAGE SENSOR (SENSOR MODULE)
LIQUID LEAKAGE SENSOR (SENSOR MODULE)자세히 보기 →
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