KOKUSAI DJ-1223V

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KOKUSAI DJ-1223V
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ModelDJ-1223V
ManufacturerKEK
Year2002
Wafer Size300mm
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SpecificationsDJ-1223V

ModelDJ-1223V
Vintage2002
Wafer Size300mm
ProcessSi3N4 (N2,DCS,NH3)
ControllerCX3002C
Power3P 208V
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