ModelSD-2005S3
Wafer Size200mm(8")
Glass Size178*178mm
Carrier200mm Low Profile Carrier
CarrierThe model depends on the carrier type
High ProfileSD-2105S3View model →
Low ProfileSD-2005S3This model
SpecificationsSD-2005S3
| Model | SD-2005S3 (Single Stack) |
| Wafer / Glass Size | Wafer : up to 200mm Wafer (Low Profile Carrier only) Glass : up to 178x178mm |
| N2 Filter Size | Hastelloy / 2 nm |
| Display | 7″ TFT Touch LCD |
| D.I Water Shower Method | Single mode Multi Spray |
| Number of N2 Heater Cartridge | 1 |
| Hot N2 Temperature | 1CH, 50 ~ 400℃ SSR Control |
| Acceleration Speed | 400 RPM / sec |
| Recipe Storage | 10 |
| Power | 1PH, 220VAC, 15A |
| Dimension(W*D*H) | 480 x 740 x 1500mm |
| Certification | CEView certificate↗ |