SpecificationsSD-3005S3
| Model | SD-3005S3 (Single Stack) |
| Wafer / Glass Size | Wafer : up to 300mm Wafer Glass : up to 300x300mm |
| N2 Filter Size | Hastelloy / 2 nm |
| Display | 7″ TFT Touch LCD |
| D.I Water Shower Method | Dual mode Multi Spray |
| Number of N2 Heater Cartridge | 2 |
| Hot N2 Temperature | 2CH, 50 ~ 400℃ SSR Control |
| Acceleration Speed | 400 RPM / sec |
| Recipe Storage | 10 |
| Power | 3PH, 220VAC, 30A |
| Dimension(W*D*H) | 750 x 835 x 1600mm |
| Certification | CEView certificate↗ |