ModelM-TRACK8
Wafer Size150mm(6") / 200mm(8")
TypeManual Track
- Multi wafer chuck for 150mm / 200mm
- PR / EBR / BSR nozzle spin coater with hot plate
- 15" touch monitor, PC base system (Windows)
SpecificationsM-TRACK8
● Features
■ 150mm(6″) / 200mm(8″) Manual TRACK
: 15″ Touch LCD Monitor
: Substrate Size – 150mm, 200mm
: Hot Plate / Cool Plate
● Specifications
Model |
M-TRACK8 |
Wafer Size |
150mm / 200mm Multi Wafer Chuck |
Spin Coater Module |
PR Nozzle 1EA / EBR Nozzle 1EA / BSR Nozzle 1EA |
Display |
15″ Touch Monitor |
Spin Motor (Max RPM) |
5000 RPM |
Controller Type |
PC Base System (Windows) |
| Hot Plate Temperature | 50 ~ 180℃ |
Utility |
CDA, PN2, Vacuum, Exhaust |
Power |
3P 220VAC 10A |
Dimension(W*D*H) |
1200*940*1745(mm) |
Warranty |
1 year |