ModelSD-2105S3
Wafer Size200mm(8")
Glass Size200*200mm
- Single Stack
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High ProfileSD-2105S3현재 모델
Low ProfileSD-2005S3모델 보기 →SpecificationsSD-2105S3
| Model | SD-2105S3 (Single Stack) |
| Wafer / Glass Size | Wafer : up to 200mm Wafer Glass : up to 200x200mm |
| N2 Filter Size | Hastelloy / 2 nm |
| Display | 7″ TFT Touch LCD |
| D.I Water Shower Method | Dual mode Multi Spray |
| Number of N2 Heater Cartridge | 2 |
| Hot N2 Temperature | 2CH, 50 ~ 400℃ SSR Control |
| Acceleration Speed | 400 RPM / sec |
| Recipe Storage | 10 |
| Power | 1PH, 220VAC, 20A |
| Dimension(W*D*H) | 540 x 740 x 1600mm |
| Certification | CE인증서 보기↗ |